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1 article(s) from Allen, Frances I

A review of defect engineering, ion implantation, and nanofabrication using the helium ion microscope

Frances I. Allen

Beilstein J. Nanotechnol. 2021, 12, 633–664, doi:10.3762/bjnano.12.52

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Figure 1: (a) Schematic diagram of the helium ion microscope. Adapted with permission from Cambridge Universi...

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Figure 2: Defect engineering using the HIM. (a) Plot of resistivity versus dose for helium ion-irradiated MoS₂...

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Figure 3: Effects of helium ion implantation studied with the HIM. (a) TEM cross-section analysis of the impl...

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Figure 4: Examples of restructuring using localized helium and neon ion irradiation. (a) Localized thinning o...

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Figure 5: Resist-based lithography using helium and neon ions. (a) 6 nm dots on a half-pitch of 7 nm fabricat...

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Figure 6: Examples of helium and neon FIB milling. (a) Graphene nanoribbons (GNR) fabricated by helium FIB mi...

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Figure 7: Examples of helium and neon FIBID. (a) Platinum-based line deposits fabricated using helium FIBID d...

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Review

Published 02 Jul 2021

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